Mems Measurement by Digital Holographic Microscope
نویسنده
چکیده
A universal digital holographic microscope to measure shape and displacement of microelement and MEMS (MicroElectroMechnacalSystems) is presented. This device is designed to exploit a measurement for MEMS with either a smooth or a rough surface. The method is based on digital laser interferometry and digital laser speckle interferometry (TV holography) incorporated with optoelectronic devices including a diode laser, a long distance microscope (LDM), optics, a CCD camera and a high precise phase shifting technique, etc. The measuring system has a capability to measure contour, out-of-displacement/deformation, vibration of microelements. It is also possible to measure residual strain in some case. In this paper, the theory and methodology of the universal digital laser micro-interferometer are described. The usefulness of the micro-interferometer is demonstrated by examples of shape and displacement measurement for different MEMS.
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